Features
High Accuracy
- Feedback control via semiconductor laser interferometer
- 27 Nanometers resolution
- 0.1 micron repeatability
- Air bearing design - averages plane errors
Fast response
- 20 ms settling time to 1 micron
- Speeds up to 0.5 meters per second
- Air bearing forcer eliminates support mechanism and friction
Compact and lightweight
- Forcer weighs only 13 lbs (6 kgs)
- Integral X-Y drive motor
- Small size interferometer using semiconductor laser
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